Overview

   Acid/Base wet bench is a fully-automated process tool used to carry out wet cleaning and etching operations in semiconductor manufacturing or other high technology products. This Bench commonly include several tanks (or modules or "baths") that is Acid, Base solutions and DI (deionized) water in a rinsing tank.

Applications

•Cleaning & surface preparation

•Etching films like Si, SiO2, doped silicate glass, Si3N4

•Stripping

•Photoresist and residue removal

•For solar cells and MEMS devices