3D Optical Profilometer
Filmetrics Profilm3D
About the Instrument
The Filmetrics Profilm3D is an affordable, non-contact optical profilometer that uses White Light Interferometry (WLI) and Phase-Shifting Interferometry (PSI) to generate precise 3D maps of surface topography. It is widely used in R&D and manufacturing for measuring surface roughness, waviness, and step heights.
Measurements & Analysis - Z-Height / Step Height: Sub-nanometer Z-resolution. Step height accuracy is typically approx. 0.7% and resolution goes down to 0.1 nm.
- Roughness (Ra, Rq, etc.): ISO 25178 compliant for surface roughness. Because it scans areas rather than just lines, area-based roughness measurements yield statistically significant, representative data.
- Thin Film Thickness: Measures film thicknesses ranging from 50 nm to 10 mm using WLI.
- Imaging Modes: Utilizes Phase Shifting Interferometry (PSI) for ultra-smooth surfaces, WLI for taller steps, and enhanced roughness modes allowing measurements on steep surface slopes up to 600 (ideal for lenses).
Applications - Semiconductor and electronics
- Medical Devices and Biomaterials
- Precision Machining and Manufacturing
- Optics
- Automotive & Aerospace
  
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