VASE by J. A. Woollam
About the Instrument
The VASE® (Variable Angle Spectroscopic Ellipsometer) by J.A. Woollam is an industry-standard research tool used to measure thin film thickness and optical constants (n and k). It serves as a non-destructive materials analysis system capable of characterizing semiconductors, dielectrics, polymers, metals, and multi-layer structures.
The most accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range - 193 to 2500nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:
- Reflection and Transmission Ellipsometry
- Generalized Ellipsometry (Anisotropy, Retardance, Birefringence
- Reflectance (R) and Transmittance (T) intensity
- Cross-polarized R/T
- Depolarization
- Scatterometry
- Mueller-Matrix
Measurements & Analysis
Ellipsometry is renowned for its ability to provide extremely accurate data on:
- Film Thickness: Capable of measuring layers from less than 1 nm (atomic mono-layers) up to several microns.
- Refractive Index: Determines how light propagates through the material.
- Extinction Coefficient: Measures the amount of light energy absorbed by the material.
- Surface Roughness: Estimates the uniformity and quality of the surface/interfaces.
- Optical Bandgap: Crucial for characterizing semiconductor and photovoltaic materials.
Applications
- Semiconductors.
- Photovoltaics
- Advanced Optical and Coatings
- Flat Screens.
