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Title

Introduction to Micro-Electro-Mechanical-Systems

Course Arabicname

Course Credithours

3

Course Description

Overview of MEMS and Microsystems; history and industry perspective. Scaling laws in iniaturization.Working principles of Microsystems; micro-sensorsandmicro-actuators. Microsystems design, modeling and fabrication processes. Case studies on several classes of devices including Bio-MEMS, microfluidics, RF MEMS, micro-robotics​

Course Linenumber

not set

Course Name

Introduction to Micro-Electro-Mechanical-Systems

Course Syllabus

Created at 1/5/2010 14:49 by System Account
Last modified at 12/5/2016 22:30 by Laith Sawaqed